TY  - JOUR
T1  - Integrated microring resonator displacement sensor for scanning probe microscopies
A1  - Kiyat, I.
A1  - Kocabas, C.
A1  - Aydinli, A.
JA  - J of Micromech. Microeng.
Y1  - 2004
VL  - 14
SP  - 374
EP  - 381
N1  - upd vol/pg 20-12-04
ER  -