TY - JOUR T1 - Design and analysis of integrated optical sensors for scanning probe microscopies A1 - Kocabas, C. A1 - Aydinli, A. JA - IEEE Sensors Journal Y1 - 2005 VL - 5 SP - 411 EP - 418 N1 - 24.11.2011 M2 - doi: 10.1109/JSEN.2005.846172 ER -