TY  - JOUR
T1  - Design and analysis of integrated optical sensors for scanning probe microscopies
A1  - Kocabas, C.
A1  - Aydinli, A.
JA  - IEEE Sensors Journal
Y1  - 2005
VL  - 5
SP  - 411
EP  - 418
N1  - 24.11.2011
M2  - doi: 10.1109/JSEN.2005.846172
ER  -