TY  - JOUR
T1  - Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films
A1  - Dana, A.
A1  - Tokay, S.
A1  - Aydinli, A.
JA  - Materials Science in Semiconductor Processing
Y1  - 2006
VL  - 9
SP  - 848
EP  - 852
ER  -