TY  - JOUR
T1  - Effects of thermal annealing on the morphology of the AlxGa(1-x)N films
A1  - Corekci, S.
A1  - Tekeli, Z.
A1  - Cakmak, M.
A1  - Ozcelik, S.
A1  - Dinc, Y.
A1  - Zeybek, O.
A1  - Ozbay, E.
JA  - Materials Science in Semiconductor Processing
Y1  - 2009
VL  - 12
SP  - 238
EP  - 242
ER  -