TY  - JOUR
T1  - RF-MEMS Load Sensors with Enhanced Q-factor and Sensitivity in a Suspended Architecture
A1  - Melik, R.
A1  - Unal, E.
A1  - Perkgoz, N.K.
A1  - Puttlitz, C.M.
A1  - Demir, H.V.
JA  - Microelectronic Engineering
Y1  - 2011
VL  - 88
SP  - 247
EP  - 253
N1  - upd vol/pg 07-01-11
ER  -