TY - JOUR T1 - High quality single-crystal germanium-on-insulator on bulk Si substrates based on multistep lateral over-growth with hydrogen annealing A1 - Yu, H-Y. A1 - Cheng, S. A1 - Park, J-H. A1 - Okyay, A.K. A1 - Onbasli, M.C. A1 - Ercan, B. A1 - Nishi, Y. A1 - Saraswat, K.C. JA - Applied Physics Letters Y1 - 2010 VL - 97 SP - 063503-1 EP - 3 N1 - 07.11.2011 M2 - doi: 10.1063/1.3478242 ER -