High speed atomic force microscopy using an integrated actuator and optical lever detection
Type of publication: | Article |
Citation: | |
Publication status: | Accepted |
Journal: | Review of Scientific Instruments |
Volume: | 67 |
Year: | 1996 |
Pages: | 3294-3297 |
DOI: | 10.1063/1.1147410 |
Keywords: | |
Authors | |
Added by: | [] |
Total mark: | 5 |
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