Independent parallel lithography using the atomic force microscope
Type of publication: | Article |
Citation: | |
Publication status: | Accepted |
Journal: | J of Vacuum Science and Technology B |
Volume: | 14 |
Year: | 1996 |
Pages: | 2456-2461 |
DOI: | 10.1116/1.588753 |
Keywords: | |
Authors | |
Added by: | [] |
Total mark: | 5 |
Attachments
|
|
Notes
|
|
|
|
Topics
|
|
|