Analysis and design of interdigital cantilever as a displacement sensor
| Type of publication: | Article |
| Citation: | |
| Publication status: | Accepted |
| Journal: | J Applied Physics |
| Volume: | 83 |
| Year: | 1998 |
| Pages: | 7405-7415 |
| DOI: | 10.1063/1.367984 |
| Keywords: | |
| Authors | |
| Added by: | [] |
| Total mark: | 5 |
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