Micromachined III-V cantilevers for AFM-tracking scanning Hall probe microscopy
Type of publication: | Article |
Citation: | |
Publication status: | Accepted |
Journal: | J of Micromech. Microeng. |
Volume: | 13 |
Year: | 2003 |
Pages: | 124-128 |
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Authors | |
Added by: | [] |
Total mark: | 5 |
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