Low damage etching of GaN surfaces via bias assisted PEC oxidation in deionized water
Type of publication: | Article |
Citation: | |
Publication status: | Accepted |
Journal: | J of Electronic Materials |
Volume: | 36 |
Year: | 2007 |
Pages: | 629-633 |
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Authors | |
Added by: | [] |
Total mark: | 5 |
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