Publications of Hanyaloglu, B.
1999
| , , and , Low dielectric constant Parylene-F-like films for intermetal dielectric applications (1999), in: Applied Physics Letters, 74(606-608) |
[DOI] |
| , , and , Low dielectric constant Parylene-F-like films for intermetal dielectric applications (1999), in: Applied Physics Letters, 74(606-608) |
[DOI] |