Growth of Ge Nanoparticles on SiO2/Si interfaces during Annealing of Plasma Enhanced Chemical Vapor Deposited Thin Films
Type of publication: | Article |
Citation: | |
Publication status: | Accepted |
Journal: | Thin Solid Films |
Volume: | 515 |
Year: | 2007 |
Pages: | 6281 |
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Authors | |
Added by: | [] |
Total mark: | 5 |
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