Publications of Puttlitz, C.M.
2011
RF-MEMS Load Sensors with Enhanced Q-factor and Sensitivity in a Suspended Architecture (2011), in: Microelectronic Engineering, 88(247-253) | , , , and ,
RF-MEMS Load Sensors with Enhanced Q-factor and Sensitivity in a Suspended Architecture (2011), in: Microelectronic Engineering, 88(247-253) | , , , and ,