Publications of Puttlitz, C.M. sorted by first author
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| , , , and , RF-MEMS Load Sensors with Enhanced Q-factor and Sensitivity in a Suspended Architecture (2011), in: Microelectronic Engineering, 88(247-253) |
| , , , and , RF-MEMS Load Sensors with Enhanced Q-factor and Sensitivity in a Suspended Architecture (2011), in: Microelectronic Engineering, 88(247-253) |