Integrated microring resonator displacement sensor for scanning probe microscopies
| Type of publication: | Article |
| Citation: | |
| Publication status: | Accepted |
| Journal: | J of Micromech. Microeng. |
| Volume: | 14 |
| Year: | 2004 |
| Pages: | 374-381 |
| Keywords: | |
| Authors | |
| Added by: | [] |
| Total mark: | 5 |
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