RF-MEMS Load Sensors with Enhanced Q-factor and Sensitivity in a Suspended Architecture
Type of publication: | Article |
Citation: | |
Publication status: | Accepted |
Journal: | Microelectronic Engineering |
Volume: | 88 |
Year: | 2011 |
Pages: | 247-253 |
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Authors | |
Added by: | [] |
Total mark: | 5 |
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