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 [BibTeX] [RIS]
Integrated microring resonator displacement sensor for scanning probe microscopies
Type of publication: Article
Citation:
Publication status: Accepted
Journal: J of Micromech. Microeng.
Volume: 14
Year: 2004
Pages: 374-381
Keywords:
Authors Kiyat, I.
Kocabas, C.
Aydinli, A.
Added by: []
Total mark: 5
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