Integration of through-wafer interconnects with a two-dimensional cantilever array
Type of publication: | Article |
Citation: | |
Publication status: | Accepted |
Journal: | Sensors and Actuators A - Physical |
Volume: | 83 |
Year: | 2000 |
Pages: | 118-123 |
DOI: | 10.1016/S0924-4247(99)00381-7 |
Keywords: | |
Authors | |
Added by: | [] |
Total mark: | 5 |
Attachments
|
|
Notes
|
|
|
|
Topics
|
|
|