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Publications of Soh, H.T.
2000
| , , , , , , , and , Integration of through-wafer interconnects with a two-dimensional cantilever array (2000), in: Sensors and Actuators A - Physical, 83(118-123) |
[DOI] |
1999
| , , and , Nanometer-scale patterning and individual current-controlled lithography using multiple scanning probes (1999), in: Review of Scientific Instruments, 70(2822-2827) |
[DOI] |
1998
| , , , and , Surface micromachined capacitive ultrasonic transducers (1998), in: IEEE Trans on Ultrasonics, Ferroelectrics and Frequency Cont, 45(678-690) |
[DOI] |
1996
| , , , and , Silicon micromachined ultrasonic immersion transducers (1996), in: Applied Physics Letters, 69(3674-3676) |
[DOI] |