Publications of Kenny, T.W.
2000
| , , , , , , , and , Integration of through-wafer interconnects with a two-dimensional cantilever array (2000), in: Sensors and Actuators A - Physical, 83(118-123) |
[DOI] |
| , , , , , , , and , Integration of through-wafer interconnects with a two-dimensional cantilever array (2000), in: Sensors and Actuators A - Physical, 83(118-123) |
[DOI] |